Microelectromechanical XNOR and XOR logic devices

نویسندگان

  • Makoto Mita
  • Manabu Ataka
  • Hiroshi Toshiyoshi
چکیده

We have developed a new microelectromechanical logic device using the MEMS (Micro Electro Mechanical Systems) technology. This device consists simply of a single cantilever and two driving electrodes with two contact pads for electrostatic operation. Both exclusive NOR (XNOR) and exclusive OR (XOR) logic devices have been realized using this simple construction.

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عنوان ژورنال:
  • IEICE Electronic Express

دوره 10  شماره 

صفحات  -

تاریخ انتشار 2013